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Issue Year | Title | Author(s) | Type | Views | Downloads |
---|---|---|---|---|---|
2014 | RF Magnetron Sputtering of Silicon Carbide and Silicon Nitride Films for Solar Cells | Zakhvalinskii, V.S.; Piljuk, E.A.; Goncharov, I.Yu.; Rodriges, V.G.; Kuzmenko, A.P.; Taranenko, S.V.; Abakumov, P.A. | Article | 706580743 | -1579941867 |
2013 | Features of Structure of Magnetron Films Si3N4 and SiC | Kuzmenko, A.P.; Chekadanov, A.S.; Zakhvalinsky, S.V.; Pilyuk, E.A.; Dobromyslov, M.B. | Article | 61063005 | 79788135 |
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- 1 2014